Used LAM RESEARCH Rainbow 4420 #9195092 for sale
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ID: 9195092
Wafer Size: 6"
Vintage: 1997
Poly / Nitride etcher, 6"
Software: Classic
Chuck: Clamp
Loader type: Hine indexer
ENT Shuttle
Aligner
Includes:
Chamber ceramics
Onboard RF Generator
Remote
Cable harness
Automatic fuses
(8) Gas valve inputs: He, Cl2, O2, HBr, Cl2, SF6, O2, CF4
Does not include chiller
1997 vintage.
LAM RESEARCH Rainbow 4420 Etcher/Asher is an advanced manufacturing device developed to etch and ash thin films. It is composed of a process chamber, a controller unit, and a resist chamber. The process chamber is made of Polyvinyl Chorephtalate (PVC) and contains two electrostatic-pads and a plasma power source. The electrostatic-pads are responsible for maintaining the film under uniform and stable conditions during etching/ashing processes. The plasma power source is used to etch and ash the thin films. The controller unit is controlled by a GUI and provides communication between the machine and the operator. With the controller unit, temperature and pressure settings can be adjusted to optimize the etching/ashing process and to streamline operations. Rainbow 4420 utilizes reactive ion etching and ion-assisted ash techniques to etch and ash extremely thin films. The thin films are exposed to the reactive plasma, which enables the dissociation of material bonds and the etching or ashing of the thin film. The reactive plasma is generated by the plasma tool located on the end of the power supply system. The chamber functions at low pressures and high temperatures and permits high rates of thin film etching and ashing with uniformity over the entire substrate. LAM RESEARCH Rainbow 4420 is highly efficient, as it is capable of performing both etching and ashing operations in one process chamber. It is also equipped with a temperature control system and a process chamber cooling system, which enable it to achieve high-precision processing with reproducible results. In addition, Rainbow 4420 is designed to reduce operating costs and to increase the throughput rate. With its high-precision operation, LAM RESEARCH Rainbow 4420 is an ideal tool for the etching and ashing of thin films.
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