Used LAM RESEARCH Rainbow 4420 #9242186 for sale
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ID: 9242186
Wafer Size: 8"
Polysilicon etchers, 8"
Stand alone
SECS Interface
Rainbow mainframe
Integrated SMIF
Orbitally welded gas box
Backside helium cooler
Helium cooling MFC type: UPC-8130
Remote RF cart
LAM 851-180089-111 Remote RF cart
LAM P/N: 851-014680-583-F-GEN Remote RF cart
853-025903-002-A-262C RF Match type
Main on-board AC distribution type: Fused
Remote AC box
Etch chamber
Clamp
ENI OEM-650A RF Generator
EDWARDS IQDP80 Loadlock pump
EDWARDS IQDP80 / QMB250 Etch chamber pump
(2) LAM 2080 TCU Chillers
LAM 852-110198-001-C-6882
Gas box configuration:
Gas line / Gas / Flow (sccm) / MFC / Model
PM1-1 / HE / 500 / Unit / 1660
PM1-2 / AR / 500 / Unit / 1660
PM1-3 / O2 / 50 / Unit / 1660
PM1-4 / C2F6 / 500 / Unit / 1660
PM1-5 / SF6 / 500 / Unit / 1660
PM1-6 / HBr / 200 / Unit / 1660
PM1-7 / CL2 / 500 / Unit / 1660
PM1-8 / NF3 / 0 / Unit / 1660
Power supply: 208 V, 3-Phase.
LAM RESEARCH Rainbow 4420 is an etch/ash process tool designed for advanced semiconductor device fabrication. The tool is based on the Rainbow family platform, which is highly configurable and scalable to meet the demands of today's ever-evolving device manufacturing needs. Rainbow 4420 offers the highest throughput and lowest cost of ownership of the Rainbow family, making it an ideal solution for many high-volume wafer-level applications. LAM RESEARCH Rainbow 4420 offers a range of process capabilities, including etch/ash, strip, and double-sided etch. It supports multiple process chambers and a wide range of substrates and cathodes, allowing for flexible and precise processing. The integrated CHA technology enables very high-yield results, while its 3D correction capability reduces non-uniformity and enhances recipe performance. Rainbow 4420 also features programmable wafer placement control, providing precise wafer motion control throughout the entire recipe. The tool features advanced process control and monitoring, enabling precise end-point detection and adjustment, even in the most demanding applications. The core module of the tool is the Super Fab controller, which is capable of managing up to 8 process chambers simultaneously, as well as its advanced process control and monitoring systems. The Super Fab also provides an integrated calibration system to ensure optimum performance. LAM RESEARCH Rainbow 4420 is designed for rapid, low-cost production of device layers. It is fully compliant with SEMI SECS/GEM standards and has 99.9% uptime availability. The tool also has a wide range of options for additional accessories, including power loads, dummy wafer, and sputter module. It is also compatible with the YieldFlex software suite, providing enhanced a range of yield optimization options. Rainbow 4420 is a reliable and efficient tool, offering superior performance and reliability. With its excellent flexibility and reliability, this tool is ideal for many device manufacturing applications.
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