Used LAM RESEARCH Rainbow 4420 #9300193 for sale
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LAM RESEARCH Rainbow 4420 is an etcher/asher used in semiconductor process technology. It is suitable for front and back side of wafer processing and can be employed in many applications, such as etching and ashing in polysilicon and metal etching and planarization processes. The 4420 is designed to provide high uniformity, evenness, and throughput over long processing periods. The 4420 is a non-contact tool that makes use of plasma-based etching and ashing technology to chemically etch the surface of target substrates. The tool's dual chamber design eliminates cross contamination of substrates. The 4420 is capable of hot digging and annealing processes and can process substrates up to 125 mm in diameter. The 4420 also has a patented fast plasmal tank t/d switch that allows users to quickly switch from plasma etching to dry etching. The 4420 is equipped with a number of advanced process technologies to enable consistent, repeatable results. It offers advanced tuning for medium to high power etching processes, as well as digital tuning for slower, low power etching. Additionally, the 4420 has a fully integrated 16 zone matrix that allows users to tailor processes according to their specific application needs. The 4420 is backed by LAM RESEARCH extensive research and development, which is why its overall design is highly reliable and stable. It is capable of running consistently for long periods even in harsh environments, making it a top choice for high-volume manufacturing processes. The tool has a variety of protection mechanisms in place to safeguard sensitive substrates from damage. Moreover, it is compatible with numerous monitoring and process control systems, offering advanced traceability and feedback. In summary, Rainbow 4420 is an advanced, reliable etcher/asher that is suitable for a variety of advanced process applications. Its multi-zone matrix and process tuning functions enable consistent and repeatable results, while its design features ensure high uniformity and throughput. With its multiple protection features, LAM RESEARCH Rainbow 4420 is the obvious choice for any semiconductor application.
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