Used LAM RESEARCH Rainbow 4420 #9384291 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9384291
Wafer Size: 6"
Plasma etcher, 6"-8"
EDWARDS iQDP80 / QMB500 Pump chamber
Indexer type: Hinge 38A, 6"-8"
Robot type: Harmonic drive
Robot blade: AL, 6"-8"
EMO Button guard rings
CRT Monitor
Chamber type: Standard
Process: Plasma cleaner
Controller: 32-Bit Microprocessor with CRT
AL Anodize
Source type: Plasma system
RF Power: OEM-12A
Photodiode optical Endpoint
AC2 Pressure control
Temp control: Chiller
Chuck Type: Mechanical clamp, 6"
Match: Manual
Gases:
Model / SSCM / Gas
UFC-1200 / 100 SCCM / O2
UFC-1200 / 300 SCCM / O2.
LAM RESEARCH Rainbow 4420 is a state of the art etching / ashing equipment used for the development and fabrication of complex semiconductor devices. With its advanced technology, Rainbow 4420 is able to deliver exceptionally high performance in etching and ashing processes. LAM RESEARCH Rainbow 4420 offers excellent flexibility due to its large working area and its adjustable distance between the top electrodes on the lower chamber. For added process reliability, Rainbow 4420 comes equipped with an Automatic Electrode Adjustment (AEM) system that allows for rapid and precise alignment of the lower and top electrodes, allowing for accurate and repeatable processes. The unit is powered by an automated Computer Numerical Control (CNC) machine that enables it to perform multiple different etching and ashing operations automatically. This CNC tool features high precision and optimal repeatability for exact process control and repeatability. For added safety, LAM RESEARCH Rainbow 4420 comes equipped with a vacuum chamber that helps to protect the integrity of the substrates during the etching / ashing process. This reduces the potential of cross contamination and helps to maintain the quality of the finished products. Rainbow 4420 is also capable of operating at high speeds while still producing excellent results. The asset can run a variety of process recipes, including etching and ashing, to ensure that the most complex requirements are met. Overall, LAM RESEARCH Rainbow 4420 represents a highly advanced etching and ashing model that utilizes the latest technology available to deliver superior results. This equipment is designed for quality assurance and superior process control which makes it an excellent choice for any semiconductor development and fabrication lab.
There are no reviews yet