Used LAM RESEARCH Rainbow 4420 #9384291 for sale

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ID: 9384291
Wafer Size: 6"
Plasma etcher, 6"-8" EDWARDS iQDP80 / QMB500 Pump chamber Indexer type: Hinge 38A, 6"-8" Robot type: Harmonic drive Robot blade: AL, 6"-8" EMO Button guard rings CRT Monitor Chamber type: Standard Process: Plasma cleaner Controller: 32-Bit Microprocessor with CRT AL Anodize Source type: Plasma system RF Power: OEM-12A Photodiode optical Endpoint AC2 Pressure control Temp control: Chiller Chuck Type: Mechanical clamp, 6" Match: Manual Gases: Model / SSCM / Gas UFC-1200 / 100 SCCM / O2 UFC-1200 / 300 SCCM / O2.
LAM RESEARCH Rainbow 4420 is a state of the art etching / ashing equipment used for the development and fabrication of complex semiconductor devices. With its advanced technology, Rainbow 4420 is able to deliver exceptionally high performance in etching and ashing processes. LAM RESEARCH Rainbow 4420 offers excellent flexibility due to its large working area and its adjustable distance between the top electrodes on the lower chamber. For added process reliability, Rainbow 4420 comes equipped with an Automatic Electrode Adjustment (AEM) system that allows for rapid and precise alignment of the lower and top electrodes, allowing for accurate and repeatable processes. The unit is powered by an automated Computer Numerical Control (CNC) machine that enables it to perform multiple different etching and ashing operations automatically. This CNC tool features high precision and optimal repeatability for exact process control and repeatability. For added safety, LAM RESEARCH Rainbow 4420 comes equipped with a vacuum chamber that helps to protect the integrity of the substrates during the etching / ashing process. This reduces the potential of cross contamination and helps to maintain the quality of the finished products. Rainbow 4420 is also capable of operating at high speeds while still producing excellent results. The asset can run a variety of process recipes, including etching and ashing, to ensure that the most complex requirements are met. Overall, LAM RESEARCH Rainbow 4420 represents a highly advanced etching and ashing model that utilizes the latest technology available to deliver superior results. This equipment is designed for quality assurance and superior process control which makes it an excellent choice for any semiconductor development and fabrication lab.
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