Used LAM RESEARCH Rainbow 4420 #9410077 for sale

LAM RESEARCH Rainbow 4420 is an advanced vertical etcher and asher designed for ultra-high uniformity and throughput. It is ideally suited for the patterning of both silicon and non-silicon materials. This stand-alone unit offers superior process control from low pressure plasma to high energy ion energy deposition. The equipment offers a unique gas panel and innovative gas mixing system, allowing users to precisely match the process to the targeted material. With an external gas panel, uniform in-situ etching and cleaning can be achieved. A three-dimensional optical unit provides an internal and external image of the process zone with resolution to 250 nm. Within Rainbow 4420, a magnetic array waveguide provides extremely uniform processing of both planar and cylindrical substrates. Coupled with the machine's plasma processes, the array waveguide enables the ability to adjust the parameters to match the material being processed. LAM RESEARCH Rainbow 4420 is designed for superior feature transfer. The combination of an advanced chamber and variable multiple ion source tool enables excellent feature definition at low resistivities. Additionally, the unit can achieve ultra-low come rates and feature profiles with small diameter down to 1.5 μm using a dry etch process. Rainbow 4420 is perfect for high-volume production of complicated structures. This is accomplished through an advanced multi-step patterning process that can provide high-resolution features down to 20 nm. Additionally, its multi-step high-aspect ratio deposition process allows for higher area fill requirements without compromising yield. LAM RESEARCH Rainbow 4420 is a reliable and robust machine that is highly automated and has excellent reproducibility. Its integration with LAM RESEARCH distributed intelligence platform eliminates manual errors and simplifies data export. Additionally, the asset includes several safety features and wide range of chimney selections to protect personnel and products. Overall, Rainbow 4420 is a powerful etcher and asher that provides the highest levels of process control, feature transfer and uniformity. The model's unique gas panel is perfect for matching the process to the targeted material, while its magnetic array waveguide enables superior feature definition and area fill. LAM RESEARCH Rainbow 4420 is ideal for high-volume production of complicated structures with resolution down to 20 nm.