Used LAM RESEARCH Rainbow 4420 #9411620 for sale
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ID: 9411620
Wafer Size: 6"
Plasma etcher, 6"-8"
EDWARDS iQDP80 / QMB500 Pump chamber
Indexer type: Hinge 38A, 6"-8"
Robot type: Harmonic drive
Robot blade: AL, 6"-8"
EMO Button guard rings
CRT Monitor
Chamber type: Standard
Process: Plasma cleaner
Controller: 32-Bit Microprocessor with CRT
AL Anodize
Source type: Plasma system
RF Power: OEM-12A
Photodiode optical Endpoint
AC2 Pressure control
Temp control: Chiller
Chuck Type: Mechanical clamp, 6"
Match: Manual
Gases:
Model / SSCM / Gas
UFC-1200 / 100 SCCM / O2
UFC-1200 / 300 SCCM / O2.
LAM RESEARCH Rainbow 4420 Etcher/Asher is an advanced etcher and lifter-off equipment for microelectronic circuit fabrication. It is is ideal for dielectric deposition, annular ring formation, and oxidation hardening. Rainbow 4420 allows accurate, uniform processing of substrates up to 150mm in diameter, with a maximum height of 25mm for the lift-off processing. It includes a multi-level process control option, allowing for adjustable temperature, pressure, and time cycle parameters to enhance process repeatability and production efficiencies. LAM RESEARCH Rainbow 4420 utilizes a two-chamber configuration. The etching chamber offers the benefit of the atmospheric plasma technology, providing uniform etching with a clean, low-particle work environment. The lifter-off chamber provides automated handling of substrates, as well as a high-performance magnetically-driven focusing mechanism for higher process accuracies. The etching chamber of Rainbow 4420 is designed to provide clean processing that is free of resist, dust, and metal particles. The chamber is temperature controlled, making it easy to manage process times. Its digital control system allows for the efficient use of gas resources and etched results. The lifter-off chamber of LAM RESEARCH Rainbow 4420 is equipped with a proprietary high-performance segmented-type magnetically-driven focus element, providing highly accurate results. The chamber also offers a bypassing station for the substrate transfer to the lifter-off chamber. Rainbow 4420 features precise process control with a large range of programmable parameters, including pressure and temperature settings. With smooth operation and precise control, this allows the unit to produce consistent results. It also features a materials management machine to ensure precise mixture of gases and chemicals for perfect process control. LAM RESEARCH Rainbow 4420 tool comes with an intuitive Windows-based software interface, allowing operators to have full control over the etching process as well as the lifter-off process. This allows for in-depth monitoring, performance tweaking, and data logging for maximum control and accuracy. Rainbow 4420 is a sophisticated etching and lifter-off machine that offers the highest level of precision and control for microelectronic circuit fabrication. With its powerful processing and accurate control, it can help users maximize results and productivity in the fabrication process.
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