Used LAM RESEARCH Rainbow 4500 #151093 for sale
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ID: 151093
Wafer Size: 8"
Vintage: 1991
Oxide etcher, 8"
Standalone configuration
Software: Envision
Wafer held by electrostatic chuck
Plumbed for gases: Ar, He, N2, O2, CF4, CHF3
Power: 208 Volts, 3-phase, 30 Amps
Ergonomic cassette-tilt option
1991 vintage.
LAM RESEARCH Rainbow 4500 etcher / asher is an advanced dual-use semi-atmosphere system that offers precise and dependable plasma etching and wet-processing capabilities. It is suitable for a variety of high-end advanced plating and etching applications. Rainbow 4500 comes with a fully integrated x,y,z stage, allowing the user to precisely control the etching and plating process from start to finish. Its flexible design allows users to automate a complete process flow utilizing the same machine. Its large chamber size makes it a great choice for etching or plating large substrates. LAM RESEARCH Rainbow 4500 is designed specifically for advanced plasma etching and asher applications. It employs advanced RF power supplies for precise etching and uniform deposition. The RF energy generated is focused within the etching chamber allowing for a high degree of accuracy and repeatability in all etching applications. Rainbow 4500 is equipped with a variety of standard features that enable users to tailor their etching and plating processes. These features allow the user to control process variables such as etch rate, etch depth, deposition rate, film characteristics, etch profile, and even layer thickness. The asher portion of LAM RESEARCH Rainbow 4500 can handle a variety of processes including chemical vapour deposition and dry etching. It is also capable of controlling diffusion, contouring, and patterning processes. This feature allows users to create unique and intricate structures that are difficult to achieve with traditional plating methods. Rainbow 4500 is an industry leader in performance and versatility. It offers excellent results when used in conjunction with high-end plating or etching processes. Its integrated features allow for precise and repeatable process control, ensuring that each etched or plated substrate is of the highest quality. As such, LAM RESEARCH Rainbow 4500 is a great choice for etching and plating applications that require unparalleled accuracy and repeatability.
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