Used LAM RESEARCH Rainbow 4500 #293595658 for sale
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LAM RESEARCH Rainbow 4500 is a plasma-based etcher/asher designed for production, research, and other applications requiring precise etching and ashing of various materials. The equipment is ideal for etching and ashing of microelectronics, optoelectronics, bioelectronics, and more. It provides high throughput, with cycle times of less than 20 seconds in some etching applications, and the flexibility to achieve a wide range of etching parameters, accommodating process requirements in different vertical markets. Rainbow 4500 utilizes a cold cathode, inductively coupled plasma (ICP), and turbo pumping technology to generate a high density plasma from chemical precursors including SF6, CF4, O2, Ar, and other noble gases. Its low thermal budget provides a greater level of control for sensitive material substrates, such as GaAs and other III-V compounds, while its advanced uniformity control ensure accuracy and repeatability for highly demanding coating and etching applications. The system is also equipped with the latest process automation technologies, including automated gas delivery, pressure and temperature control, and plasma power monitoring. The unit has the capability to program-in up to 15 different process recipes, enabling fast and efficient process tool tuning. Further, its advanced monitoring features monitor substrate temperatures and chamber pressures to ensure safe and repeatable operation. LAM RESEARCH Rainbow 4500 features a small footprint of just 2 x 3 ft, so it can be easily integrated into any laboratory or manufacturing environment. The etcher/asher also features a wide range of accessories for secure connection and easy installation, as well as a library of tutorials for quick and easy set-up. The machine is highly reliable, offering up to 98.5% uptime in most applications, so it is well suited for high-mix production needs. Overall, Rainbow 4500 is a highly advanced etcher/asher that offers a robust yet flexible platform for the etching and ashing of electronics components. It features advanced process control, a wide range of accessories, and reliable operation, making it an ideal choice for a variety of production and research applications.
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