Used LAM RESEARCH Rainbow 4500 #293762182 for sale

ID: 293762182
Wafer Size: 6"
Etcher, 6" ADVANCED ENERGY PDW 2200 RF Generator.
LAM Rainbow 4500 is a high performance, laser-assisted chemical etcher equipment designed for the processing of oxide, polyimide and other thin film materials. This advanced etching system combines ultraviolet (UV) laser ablation with chemical etching techniques, to achieve superior results at faster speeds than other etching systems. Rainbow 4500 features a high-precision 3-axis motion control unit, providing excellent repeatability and accuracy during the etching process. Each of the three axes has its own dedicated servomotor with onboard drivers, providing precise control of the etching process. The machine also includes a semiconductor laser which is used to position and pattern the UV laser beam accurately onto the substrate surface. This UV laser has a wavelength of 355nm and is capable of producing spot sizes down to 30µm. In order to optimize etch results, LAM Rainbow 4500 has an integrated tool for process control. Through the computerized process control asset, users can adjust both the laser parameters and the chemistry solution in order to tailor the etching process to a specific task. The model also has robust safety features including retraction on degradation of the deposition rate, hole filling, etc. Rainbow 4500 comes with an automated cleaning and drying equipment for easy maintenance. This system ensures that the etcher is always ready for use and minimizes downtime. Its durable construction makes it a reliable, long-term tool for industry and research applications. In summary, LAM Rainbow 4500 is a state-of-the-art etcher unit that combines laser ablation and chemical etching techniques to quickly and accurately process thin film materials. Its computerized process control machine provides precise control and flexibility, and it is easy to maintain with its automated cleaning and drying tool. Its superior precision and repeatability make it an ideal tool for a variety of industry and research applications.
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