Used LAM RESEARCH Rainbow 4500 #9231666 for sale

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ID: 9231666
Wafer Size: 6"
Oxide etcher, 6".
LAM RESEARCH Rainbow 4500 is a fully automated etcher/asper designed for high productivity etching and ashing operations. It is suitable for a variety of applications across a broad range of process technologies. Rainbow 4500 was designed to simplify implementation while enhancing manufacturing productivity. The 4500 has an advanced shape-orientation control system utilizing multi-axis motion capabilities and adhesively bonded wafers up to 6 inches square. Its flexible architecture allows for streamlined equipment integration and energy efficient process operations. The 4500 has multiple sources providing the ability to etch and ashing operations with a variety of plasma etching and cleaning gases. The 4500 also features advanced temperature control technology encased in a temperature-controlled chamber which minimizes temperature variation from wafer-to-wafer. It is capable of etching and ashing with low temperature applications and is able to remove tungsten from wafers with extreme accuracy. The 4500 also has integrated safety features such as emergency gas shut off, automatic process monitoring and safe distancing that ensure safe operation. The 4500 is constructed with advanced four-point chambers to ensure uniformity of process results over a large area. This allow it to efficiently etch and ashing with an even energy distribution, making it a reliable tool for production and development processes. The 4500 offers smart load ports, built-in vision systems, automatic wafer monitoring and data analysis capabilities. It also has intelligent wafer positioning management to eliminate any potential wafer positioning issues. Overall, LAM RESEARCH Rainbow 4500 is an advanced etcher and asher with multiple sources and capabilities to provide efficient, uniform and accurate operations. Its integrated safety system and temperature control chamber, along with its advanced four-point chambers, wafer positioning management and smart load ports, make it an ideal tool for a variety of etching and ashing applications. Additionally, its ability to accurately remove tungsten from wafers make it a desirable tool for production and development processes.
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