Used LAM RESEARCH Rainbow 4520 #152457 for sale

LAM RESEARCH Rainbow 4520 ultra-high throughput asher and etcher is a high-performance equipment designed for advanced semiconductor device development. Rainbow 4520 is ideal for application-critical batch processing for R&D, material science, and life sciences. The system is comprised of multiple chambers, capable of operation in both an etching (dry) and ashing (wet) mode. LAM RESEARCH Rainbow 4520 features precision process control with a 300-degree rotation furnace and a total of nine independently controlled gas inputs, enabling a wide variety of process flows. A built-in embedded computer allows a user to easily program, monitor, and control every step of the process. The built-in multiple chambers offer flexibility of operation, with the capability of running low, medium, and high thermal etching processes and high-temperature ashing in a variety of configurations. The unit can be easily monitored and controlled in all modes of operation, with real-time monitoring of the temperature within the chamber, allowing for tuning to maximize process throughput and yield. In addition, Rainbow 4520 features a unique RF plasma source, with a gas injection bowl and built-in flares, allowing for uniform plasma processing at low temperatures, enhancing throughput, adhesion, and uniformity. The integrated RF source generates a low-power plasma, which is ideal for developing novel photoresists, enhancing ashing selectivity, and improving etch rate uniformity. LAM RESEARCH Rainbow 4520 also features interfacial diagnostics to ensure quality of the etching and ashing process. Several additional features make Rainbow 4520 a reliable and outstanding etching and ashing machine. These features include a fully automated recipe-controlled transfer tool and a sample-integrity verification asset designed to prevent mis-processing. Overall, LAM RESEARCH Rainbow 4520 is an excellent choice for anyone seeking a high-performance etching and ashing model. Its sophisticated features and robust design make it an ideal choice for R&D, materials science and life sciences applications. With a wide variety of process flows, precision process control, integrated RF source, and interfacial diagnostics, this equipment offers excellent performance and reliable results.