Used LAM RESEARCH Rainbow 4520 #9098084 for sale

LAM RESEARCH Rainbow 4520 is a state-of-the-art etcher and asher designed to carry out precise micromachining tasks with maximum efficiency. This all-in-one equipment offers integrated single-wafer and batch processing capabilities, with the flexibility to meet a wide range of industrial requirements. Rainbow 4520 is among the most advanced models in its class, offering superior productivity, performance and reliability in one convenient solution. In terms of its technical specifications, LAM RESEARCH Rainbow 4520 has a 10-inch (254 mm) load lock with a load/unload time of only 8.5 seconds for single-wafer processing, and 16 seconds for batch loads. This is achieved by a high-speed wafer transport system, driven by a powerful 9 amp, 30 W brushless DC motor. In addition, Rainbow 4520 offers an optimum etch/aspirate rate of 10 wafers per minute, outperforming its competitors. Moreover, LAM RESEARCH Rainbow 4520 has an automated chamber cleaning unit with an advanced dousing showerhead to deliver effective cleaning for two substrates simultaneously. This machine also features an array of advanced process control features, ensuring optimal process control and repeatability. This includes accurate real time measurement and feedback of multiple data points, adjusting according to parameters set in the recipe. In addition, Rainbow 4520 has various etch/aspirate capability with optional Etch Plus and/or Aspirate Plus capability. This ensures versatility to address challenging process requirements from basic etching through hard-to-achieve aspect ratios. The tool is further armed with a fully automated fault detection operation, shutdown recovery and related diagnostics for improved asset uptime. Finally, LAM RESEARCH Rainbow 4520 features a high boost RF power supply to deliver a higher etching rate by automatically controlling the RF power based on process pressure and temperature. This drive capability is supported by a closed loop methane flow model that is designed to maintain a precise gas flow rate, ensuring consistent process outcomes. An advanced auto-purge feature monitors the carbon levels in the etching chamber in order to limit contamination and extend chamber shelf life. In sum, Rainbow 4520 is an advanced etcher / asher offering superior performance, management, and automation capabilities in one integrated solution. With its high productivity and improved process control, it is the ideal tool for achieving precise micromachining results fast.