Used LAM RESEARCH Rainbow 4520 #9175702 for sale
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ID: 9175702
Wafer Size: 6"
Etcher, 6"
Clamp process kit, 6"
Operating system: Envision
LAM 2080 Chiller.
LAM RESEARCH Rainbow 4520 is an industry-leading etcher / asher designed for advanced etching and ashing applications. Rainbow 4520 features a dual-beam laser technology for high throughput and productivity, a unique chamber design for optimal plasma density, and a wide range of process and environment control options. LAM RESEARCH Rainbow 4520 is equipped with both a high power RF and DC power source, allowing users to customize their processes through independent control of both sources. The etcher / asher offers a variety of process recipes that allow a variety of etch, ashing, deposit, and cleaning processes. All processes are optimized for enhanced throughput and yields. The unique chamber design of Rainbow 4520 offers efficient utilization of the dual-beam laser's energy and a uniform plasma density. This makes possible very fine-featured processes with minimal leakage, reducing the need for manual intervention. The chamber also features multiple sources for reactive species and a PECVD vacuum for enhanced process control. LAM RESEARCH Rainbow 4520 also provides a complete package of proprietary software tools, from process automation to process monitoring and data logging. In addition, the equipment supports metrology and sensing techniques, such as profilometry, spectroscopy, Ellipsometry, and contactless optical, to ensure precise process control. The comprehensive system provides comprehensive process control throughout all etching and ashing processes. Rainbow 4520 is equipped with a comprehensive, user-friendly interface to ensure safe and user-friendly operation. The unit is verified and calibrated for precise repeatable processes, with the ability for further calibration or refinement based on user feedback. The machine also provides remote access for remote data storage and support, ensuring customer support is available when needed. LAM RESEARCH Rainbow 4520 is an ideal etcher / asher for large-scale production, designed to achieve faster cycle times and higher yields than traditional lithography and etching tools. With its high-performance, robust features, and easy-to-use interface, Rainbow 4520 is an industry leader for advanced etch and ashing applications.
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