Used LAM RESEARCH Rainbow 4520 #9176778 for sale

ID: 9176778
Wafer Size: 8"
Oxide etcher, 8" ESC Included.
LAM RESEARCH Rainbow 4520 is an advanced etcher / asher equipment designed to enable high-volume production of advanced electronic products. The 4520 is a high-throughput, high-accuracy plasma processing solution optimized for dielectric etch and ashing applications. It is capable of processing up to 5 wafers per cycle, and is designed to operate with a broad range of gases, including Fluoroform, Nitrogen Trifluoride, Sulfurous Acid, and XeF2. The 4520 is also fully compatible with both positive and negative wafer bias voltage conditions. The Etcher / Asher system is used in semiconductor fabrication, LED production, and other advanced electronic product lines. It can achieve high etch rates and tight process control with excellent repeatability, making it an ideal solution for high-volume production. The unit has the capability to perform etching at multiple levels and sequences with parameter settings stored in its advanced software algorithm. Rainbow 4520 has a large, 8" LCD touchscreen display that allows operators to easily adjust parameters, monitor etch rates, and review status. It is capable of running automated plasma flows to maximize process accuracy and throughput. It is also equipped with an innovative gas containment setup to ensure safe and efficient operation. The machine has a host of advanced features, such as highly stable setpoint control and real-time feedback control to ensure process repeatability from one batch to the next. It also features an advanced chamber control tool that can detect the presence of particles and contaminants in the gas flow and provide automatic adjustment to ensure repeatable processes. LAM RESEARCH Rainbow 4520 can also integrate with other process equipment, such as dryers and load locks, to create a fully integrated production asset. It is a robust, highly accurate etch and ashing model, designed to provide industrial-level performance with minimal maintenance requirements.
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