Used LAM RESEARCH Rainbow 4520 #9277852 for sale

LAM RESEARCH Rainbow 4520 Asher is a world-class etcher/asher for substrate processing with superior hardware configuration and advanced technology for improved process control and uniformity. The features of Rainbow 4520 Asher include rapid thermal anneal (RTA), fast cooling, and advanced programmable heat-soaking. This allows high temperature processing range from 25°C to high temperatures of 1400°C which is ideal for advanced applications. LAM RESEARCH Rainbow 4520 Asher is outfitted with an advanced Oxygen-Meter/Controller which monitors and controls the total in-process oxygen for both etching and annealing. This ensures an optimized process and accurate results. Rainbow 4520 Asher is capable of delivering an etch rate over ten times faster than other etchers currently on the market. This enhances productivity and turnaround time. With an advanced process control and monitoring system, advanced diagnostic capabilities, and integrated fault protection, etch rates and material consistency are also well assured. The device has a standard automatic wafer tracking capability to ensure a consistent process of all substrates. LAM RESEARCH Rainbow 4520 Asher offers superb uniformity, which is achieved by heavy opto-mechanical construction and the use of high precision electro-magnetic waveguide actuators. Additional features such as the multiple substrate size compatibility, modular process chamber design, and dielectric RF processes, provide additional uniformity and flexibility. Rainbow 4520 Asher is equipped with both low and high frequency power supplies for up to 8 frequencies. This allows for increased productivity with multiple process recipes or a multi-step in-situ anneal for improved performance. The device also features a one-of-a-kind in-line InGaAs camera which is capable of providing automatic size selection and identification for substrates, this greatly reduces manual touch up time. LAM RESEARCH Rainbow 4520 Asher provides the utmost in precision substrate processing. With superior hardware, advanced process control and monitoring, enhanced process uniformity and accurate results, Rainbow 4520 Asher is an ideal choice for many industry applications.