Used LAM RESEARCH Rainbow 4520 #9296845 for sale
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ID: 9296845
Wafer Size: 8"
Oxide etcher, 8"
Clamp
Gas supply:
Gas / Range / Connection size
He / 1 SLM / 1/4" VAC Male
O2 / 20 SCCM / 1/4" VAC Male
N2 / 100 SCCM / 1/4" VAC Male
Ar / 1 SLM / 1/4" VAC Male
CF4 / 400 SCCM / 1/4" VAC Male
CHF3 / 100 SCCM / 1/4" VAC Male
(4) PCW
Connection size: 3/8" SWG Male
ISO 80 Vacuum
NW-60 Vacuum
CDA QC6 Connector
RF Unit:
(2) PCW
Connection size: 3/8" SWG Male
Power supply: 208 V, 5 Wires, 30 A, 50/60 Hz, 3 Phase
Power box:
Power supply: 208 V, 5 Wires, 150 A, 50/60 Hz, 3 Phase.
LAM RESEARCH Rainbow 4520 is an advanced etcher/asher equipment that uses thermal transfer of energy to fabricate a wide variety of materials. It is primarily used for processing semiconductor wafers and integrated circuits, as well as for masking, planarization and surface modification. The system comes equipped with a 3-axis, high-speed linear axis unit, dynamic capacitive process pressure control and an adjustable process chamber. The 3-axis machine is capable of performing repeatable processes up to 300 mm/sec, allowing for precise creation of high-density patterns. The dynamic capacitive process pressure is used to control material removal rates, ensuring uniform etching rates across the surface of the material. Additionally, the process chamber offers a maximum temperature of 45°C, allowing materials to be processed at low temperatures, minimizing damage to the work. Rainbow 4520's intuitive user interface also makes it easy to access advanced process parameters. It offers a process control package including recipe development, wafer tracking and process monitoring. Furthermore, real-time feedback is provided to ensure that each wafer is processed accurately. Using LAM RESEARCH Rainbow 4520 tool, users have the ability to transform the surface of a variety of materials, including silicon, gallium arsenide and tantalum. This multi-layer tool can be used for etching, ashing, CVD and resist stripping with precision. It also offers precise control of the pressure and temperature, allowing for precise adjustment of the etching and ashing processes. Rainbow 4520 also comes with a range of accessories, such as load locks, temperature control modules and an inert gas feed asset. These accessories allow users to precisely control the etching and ashing processes, helping to ensure that the results are accurate. Overall, LAM RESEARCH Rainbow 4520 is a powerful etcher/asher model that offers precision control of processes. It is specifically designed for the fabrication of high-density integrated circuits, allowing for creation of intricate patterns. Furthermore, its intuitive user interface and range of accessories make it an ideal equipment for a range of applications.
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