Used LAM RESEARCH Rainbow 4520 #9300069 for sale

LAM RESEARCH Rainbow 4520 is a high-precision etcher/asher designed to safely and accurately deposit metal layers onto a variety of substrates. The etcher/asher features a six-gas configuration, which allows users to accurately control the composition and deposition rate of the material being processed. The 4520 utilizes a vertically mounted process chamber with a large capacity, allowing users to process multiple batches at once. The advanced capabilities of Rainbow 4520 provide users with complete control over the thickness, uniformity, and shape of the metal deposited. It has the highest achieved throughput among etchers/ashers of its class, with deposition rates up to 1500 nm/min. The 4520 is also equipped with patented process control engineering (PCE), a closed-loop technology that precisely monitors the deposition rate and composition for optimum results, enabling users to easily switch among various processes quickly and accurately. LAM RESEARCH Rainbow 4520 is simple to operate and offers a high level of automation, making it easy to set up and run batch processes. The intuitive control equipment allows users to monitor the process from separate displays, so they can conveniently set the parameters and run a variety of recipes. The 4520 comes with a wide range of features, including a built-in data collection software, automated recipe management, and a variety of safety features, such as process chamber vacuum, gas flow and nitrogen pressure monitoring. The robust construction of Rainbow 4520 ensures reliable operation, even in extreme environments. The etcher/asher utilizes a frame of heavy-gauge, stainless steel with low vibration and high stability. The chamber is made of stainless steel and is sealed to prevent contamination. An auto-mapped loader allows users to conveniently load and unload substrates, enabling efficient use of resources. The 4520 comes with a highly efficient exhaust system featuring active filters to ensure that all gases and particles are quickly and safely removed from the unit. Overall, LAM RESEARCH Rainbow 4520 is an advanced etcher/asher that provides high performance, easy operation, and robust construction. The six-gas configuration, high deposition rate, and advanced process control make it ideal for metal deposition, while the auto-mapped loader and efficient exhaust machine ensure safety and convenience during operation.