Used LAM RESEARCH Rainbow 4520 #9300070 for sale

LAM RESEARCH Rainbow 4520 is a highly advanced etcher / asher designed to provide high performance and efficient results. It is a revolutionary etching and ashing system that is designed to quickly and accurately etch and asher even the most difficult substrates. Rainbow 4520 has a 200mm batch elbow configuration, allowing it to process 96 substrates simultaneously. It is equipped with a powerful 21-chamber system that is capable of ashing and strip etching of various types of substrates with outstanding performance. LAM RESEARCH Rainbow 4520 also features a cutting edge technology - sequential plasma assisted etching (SPA), which allows it to maintain strict accuracy while etching and ashing. Rainbow 4520's high pressure and temperature controlled process chamber allows it etch and asher with improved throughput and controllability. Moreover, the plasma generator optimized for drying also helps its process to be executed quickly and with improved controllability. It is equipped with distributed uniformity control that helps balance the etch rates across the entire substrate. It has an enhanced CD uniformity protection feature to maintain a uniform etch rate. This feature ensures that the CD uniformity specifications are met even in critical device technologies. Additionally, LAM RESEARCH Rainbow 4520 has an auto-rescue feature that helps restore good etch rate even in the presence of hotspots or mask flaws. Rainbow 4520 also has an integrated Edge Bias System (EBS) to help minimize within-wafer non-uniformity. This feature along with the ChemRanging feature helps to maximize wafer etch yield and throughput. LAM RESEARCH Rainbow 4520 is an ideal choice for leading-edge device technology processes and is a perfect addition to any semiconductor etching facility.