Used LAM RESEARCH Rainbow 4520XLE #9097262 for sale
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ID: 9097262
Wafer Size: 8"
Poly etcher, 8"
Wafer type: flat
Processing type: vacuum
Wafer loading type: normal
Auto Pressure Controller (APC): VAT 84020-R1
Baratron 1: MKS 623 10torr
Baratron 2: MKS 622 2torr
Convectron G/Phillips 275
TMP: Vacuum TC 440-C
TMP controller: Vacuum TC 440-C
Robot: -
Robot controller: -
Generator: ENI GHW 26
Match: ENI MWM-25-02
AC rack: yes
RF controller: yes
Chiller: M and W RPC2/28W-
Process: Edwards E2M40 PFPE
Load lock: Edwards EH-250
Booster: Edwards E2M40
MFC:
Gas 1 O2 500sccm
Gas 2 N2 50sccm
Gas 3 CHF3 50sccm
Gas 4 Ar 1sccm
Gas 5 CF4 100sccm
Gas 6 He 50sccm.
LAM RESEARCH Rainbow 4520XLE etcher/asher is a precision plasma etching and ashing equipment designed to provide superior and consistent results in demanding environmental conditions. This advanced system features a reliable vacuum platform and an ergonomic design to enable users to achieve accurate and efficient processing of wafers. The 4520XLE offers a variety of advanced features such as a dual mode RF generator, extended frequency range (450 kHz to 2 GHz) and a two chamber load-lock mechanism. This unit also offers a high degree of flexibility that allows for adaptation to a wide variety of applications such as deep etch and profile control. The dual chamber load-lock mechanism ensures fast and precise placement of wafers into the processing chamber. The machine is equipped with an advanced plasma source providing a uniform etching profile over the process area. The 4520XLE is equipped with several user-friendly features and powerful process control capabilities. Its intuitive user interface provides easy access to all processing parameters, and the large color touchscreen display ensures easy navigation and control of complex processes. The tool also provides advanced remote diagnostic and software customization capabilities, allowing users to easily monitor and configure processing parameters at any time. The 4520XLE is designed to offer superior reliability and robust performance in challenging environmental conditions, such as high temperature, high humidity, and high pressure. Its mechanical design includes an isolation asset to reduce vibration in order to ensure precise and consistent results in a variety of operating conditions. Additionally, the model is designed to work according to various safety protocols and meets all relevant industry standards. In conclusion, LAM RESEARCH RAINBOW 4520 XLE is an advanced etcher/asher equipment designed to meet the demands of a wide variety of applications. Its innovative and reliable features, combined with its superior process control and efficiency, provide users with a powerful tool to achieve consistent and accurate results in challenging environmental conditions.
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