Used LAM RESEARCH Rainbow 4526 #9230652 for sale

LAM RESEARCH Rainbow 4526 is an etcher and asher equipment for semiconductor wafer processing. Rainbow 4526 system offers enhanced process control and repeatability through an integrated unit design that combines a temperature-controlled process chamber, comprehensive process monitoring and control, and reliable wafer transport and handling. LAM RESEARCH Rainbow 4526 is capable of multiple etching and ashing processes for industry standard Si, GaAs, InP, Poly-Si, SOI, and other materials. It has an exclusive "hybrid" hot-wall processing chamber design that enables reduced process temperatures, faster throughput, lower overall pressure, and higher reliability of wafer patterns. The 2.5" wafer-handling capacity, carrier-less transport machine, and the ability to perform both wet and dry processes make the tool suitable for a variety of semiconductor fabrication applications. Rainbow 4526 comes with integrated hardware and software modules that allow for efficient process monitoring and control. The asset has advanced parameter mapping capabilities and is capable of etching and ashing of multiple levels of patterns with high precision and control. An embedded process control module guarantees repeatable process control while the integrated recipes enable rapid process development and migration. The model has extensive safety features to protect personnel and components. It comes with an integrated, temperature-controlled secondary chamber to minimize thermal shock and maximize the stability of process conditions. To cap off the safety features, LAM RESEARCH Rainbow 4526 also features a full front and back access with ergonomic design which enables easy access for maintenance and repair operations. In summary, Rainbow 4526 etcher and asher equipment is a versatile, reliable, and cost effective tool for semiconductor wafer fabrication. Its integrated design combines hardware and software modules for process monitoring and control, a carrier-less wafer transport system, a temperature-controlled process chamber, and ample safety features that protect personnel and components. This makes it a comprehensive solution for etching and ashing of multiple levels of patterns with high precision and repeatability.