Used LAM RESEARCH Rainbow 4528 #9011008 for sale

LAM RESEARCH Rainbow 4528 is an etcher / asher designed for high-volume production of semiconductor components. It is a fully automated, single-wafer etch / asher equipment with a platform capable of processing up to 300 mm wafers with both low-pressure Chemical Vapor Deposition (CVD) and high-performance Plasma Enhanced CVD (PECVD) processes. Rainbow 4528 has a modular architecture that allows the user to customize the system to their specific requirements, and includes an electrostatic chuck that can be used to precisely position wafers on the chamber downward. The etch / asher features two independent plasma sources and a dynamic pressure control unit, allowing the user to precisely tune the reactor chamber pressure and etch rate. It also features a polishing machine for post-etch, pre-assemble processing, a vacuum heat exchanger for improved performance, and a proprietary batch-controlled, high-precision conveyor tool that can transport up to five wafers per process, reducing cycle time and increasing throughput. In addition, LAM RESEARCH Rainbow 4528 provides real-time monitoring of critical process parameters such as gas flow, pressure, temperature, and electrical discharge. Its sophisticated wafer mapping capability provides the user with detailed feedback on the recipe's effectiveness, while its through-the-lens wafer inspection. Rainbow 4528 is an efficient etcher / asher solution for a wide range of semiconductor products.