Used LAM RESEARCH Rainbow 4528 #9244836 for sale
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ID: 9244836
Wafer Size: 8"
Vintage: 1994
Etcher, 8"
Non-SMIF type
Automation online component: SECE
Flat orientation type
BCR
Transfer robot: Homonic driver
One process module chamber
Plasma source options: 27/2 MHz Maximum
2500 W Generator
Chuck type option: Bipolar ESC
Wafer pin-up option: Air cylinder
Gas:
(6) Gas lines
MFC Type: Analog
MFC Maker: Unit 8160
Vacuum pump: QDP80
Turbo pump: TS443BW
Signal tower
UPS: 120 VAC, 60 Hz, 3 Phase, 175A
Power: 208 VAC, 60 Hz, 3 Phase, 115A
1994 vintage.
LAM RESEARCH Rainbow 4528 is an etcher/asher designed for advanced semiconductor production. It is an automated equipment with precise temperature, vacuum, and chemical control capabilities. The system features a multi-level configurable process module, allowing for multiple process recipes to be set and recalled by the on-board operating unit. The chamber is made from stainless steel, with glass windows to monitor machine health and prevent contamination. Rainbow 4528 features a four-zone process module, allowing for different etching and ablation processes to be performed in separate zones. The process module uses three external arms for additional process gases, and a rotating wheel for fast switching between recipes and processing chambers. The tool is also equipped with a patented clutch and wheel locking mechanism, which allows for smooth and accurate rotation, even between large chambers. Process parameters can be adjusted autonomously using the in-built software and a variety of process recipes can be stored. The asset also includes a built-in monitoring model which allows the user to monitor equipment health, the process status, and the chamber temperature. The robust construction of LAM RESEARCH Rainbow 4528 ensures reliable performance, even in harsh production conditions. This system is ideal for industrial throughputs and scaling product lines. With an active sub-micron chamber, Rainbow 4528 is also capable of processing features down to 0.5 microns. The built-in safety unit and alarms ensure operator safety and product quality. LAM RESEARCH Rainbow 4528 is designed for advanced production environments, capable of creating complex process recipes tailored for specific products. The machine is broadly compatible with other LAM RESEARCH products; making it an optimal choice for semiconductor production. The intuitive GUI allows for easy setup and the tool has various automation functions for simple, repeatable processes.
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