Used LAM RESEARCH Rainbow 4600 #9313103 for sale

LAM RESEARCH Rainbow 4600 is a high-end, high-throughput etcher/asher with a modular platform comprised of a platen and four chambers that allow for dynamic configurability in either a single recipe mode or a multiple recipe mode. This flexibility allows for processing of a wide range of materials, including but not limited to, thick and thin films, metals,glass,dielectrics, and low-k materials. Rainbow 4600's two main processes, etching and updating, are accomplished using a variety of plasma sources, such as RF and DC bias plasmas, and from systems such as etch chambers, ashers, and vapor deposition chambers. The chamber models for etching operations suitable for LAM RESEARCH Rainbow 4600 include single-chamber, double-chamber, and quad-chamber configurations. Its modular platform also provides manual or automatic programmability, process control, and data logging capabilities. Rainbow 4600 is capable of producing precise etching over various materials and wafer sizes with high uniformity and high selectivity, and with a repeatability of 0.5%. This enables planarization of surfaces and selective etching of specific features with optimum repeatability. LAM RESEARCH Rainbow 4600 comes with capacitively coupled plasma (CCP) sources and can support auto-leveling, active matching, and some other advanced features which make it suitable for nanotechnology processes and other processes requiring precise etching and optimum results at high throughputs. Rainbow 4600 also features a robust and easy-to-use user interface that helps to reduce "heel effects" on etched surfaces due to inaccurate process control. The platen features a rotating vacuum lid, aseptic loading and unloading, and the capability to perform post-deposition and annealing operations. In addition, the system also provides an integrated recipe development interface, with which users can easily program a variety of etching recipes. LAM RESEARCH Rainbow 4600 is also designed for an optimal process environment. It comes with an inert purge and a closed-loop cooling system to ensure excellent cooling performance, increased repeatability of process results, and improved cost effectiveness and efficiency. Further, its robust thermal management system provides precise heat and cooling for maximum temperature control, repeatability, and accuracy. All these features combine to make Rainbow 4600 an ideal and reliable etcher/asher solution.