Used LAM RESEARCH Rainbow 4600B #9145833 for sale

LAM RESEARCH Rainbow 4600B is an etcher / asher designed for wafer fabrication in the semiconductor industry. It offers reduced cost of ownership, advanced throughput and image quality, and robust procedures for process development and control. Rainbow 4600B utilises an innovative dual chamber design to provide superior process control with high accuracy and repeatability. LAM RESEARCH Rainbow 4600B is equipped with two state-of-the-art alternating electrochemical processing cells, each of which consists of up to four independent electrodes and drives. The 4600B is designed to provide easy access to different processing parameters such as pressure, temperature, flow rate and concentration. Its user-friendly operation is enabled through intuitive process monitoring and control software. This software also helps minimize process variations, warm-up and cool-down sequences, and wafer washout / reload times for improved efficiency. It also provides the capability for customizable alarms, alerts, and recipes for improved productivity. Rainbow 4600B offers excellent uniformity of within ±1.0% with outstanding etch uniformity across the entire wafer face. Additionally, the 4600B supports either wet or dry etching, which may be necessary for certain materials. The 4600B is also capable of adjustable through-etched wafer thicknesses, which allows for exacting control over post-etch films and structures. LAM RESEARCH Rainbow 4600B is designed with extended lifetime performance and reliability. The proprietary RF-On-Metal™ electrode system is used to maintain a low particle background and reduce contamination. The 4600B features a specialized modular construction design to allow easy access to the process cells and prevent the need for a service call during maintenance. Finally, the 4600B offers a small footprint, with a total footprint of less than 2m2, making it an ideal choice for limited workspace.