Used LAM RESEARCH Rainbow 4600B #9313104 for sale

LAM RESEARCH Rainbow 4600B
ID: 9313104
Plasma etcher.
LAM RESEARCH Rainbow 4600B is a high-performance etching and ashing equipment used for the etching of various film materials such as polysilicon, silicon dioxide, and silicon nitride. It utilizes a powerful ultra-violet (UV) laser source with a range of up to 250 Watts to deliver exceptionally high removal rates for even the most difficult materials. In addition to its large on-board chamber capacity of up to 350 mm x 350 mm, the system is designed with several convenient features, such as an integrated, high-precision stage for precise positioning of substrate material, and an advanced, user-friendly software package for controlling the etch and ashing process. Rainbow 4600B is capable of achieving excellent film removal rates, even for complex etched films such as polysilicon, while maintaining high precision and uniform removal characteristics. This powerful etching unit can be used for both single- and multi-layer process applications. Its modular architecture allows for easy scalability to accommodate higher volumes while maintaining throughputs. LAM RESEARCH Rainbow 4600B is designed to be used in a variety of research and development as well as production environments. Its robust and reliable design enables it to operate for extended periods of time, with minimal downtime and maintenance. Its on-board chamber is easily accessible and includes a manual feeder tray for quick and precise loading and alignment of substrate material. Furthermore, its intelligent gas delivery machine ensures uniform etch and ashing results. In short, Rainbow 4600B is a high-performance, precise, and feature-rich etching and ashing tool that is ideally suited for both research and development as well as production, providing uniform high-quality results within a wide range of materials. Its integrated on-board asset and software make it both user-friendly and efficient and its scalability ensures its performance capacities remain unchanged, even when facing higher volumes.
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