Used LAM RESEARCH Rainbow 4720 #293758944 for sale
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LAM RESEARCH Rainbow 4720 is an etcher/asher equipment which is designed for etching, ashing, and cleaning applications in an industrial setting. The system utilizes advanced technologies and proven testing protocols to provide reliable and consistent results. The primary components of Rainbow 4720 consist of a high power RF source, an ultra-high vacuum chamber, and a standard toolkit. The high power RF source is capable of producing a wide range of frequencies from 100 kHz to 1 GHz. The RF source is capable of modulating frequency and power, allowing the user to control the etching process for a wide range of substrates. The chamber is constructed from stainless steel and is formed into an octagonal shape. It is equipped with an adjustable load lock stage and a custom designed chamber window. The chamber is designed to maintain a low base pressure (less than 1 mTORR), which helps to ensure efficient etching. The toolkit includes a sample manipulation arm, a programmable heating/cooling plate, a sample rotation unit, and a remote pump-down control box. The sample manipulation arm is used to accurately transfer substrates in and out of the chamber, while the heating/cooling plate is used to ensure temperature uniformity. The sample rotation machine is designed to ensure the optimal exposure of the substrate to the RF source. LAM RESEARCH Rainbow 4720 also utilizes adaptive controls, allowing users to adjust the parameters of the etching process to consistently yield high etch selectivity, feature definition, and process uniformity. It is also equipped with a range of plasma diagnostics, allowing users to monitor the etch process in real time. Overall, Rainbow 4720 is an ideal tool for etching, ashing, and cleaning applications in an industrial setting. It provides users with a wide range of etching capabilities and a highly reliable and consistent etch process. Additionally, it is capable of etching a variety of substrates, as well as monitoring and controlling the etch process.
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