Used LAM RESEARCH Rainbow 4720 #293817739 for sale
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LAM RESEARCH Rainbow 4720 is an etcher/asher designed for use in high volume production. This equipment is designed to be used with a variety of different process chemistries and is capable of achieving a maximum etching rate of 30.2 mm2/min. at maximum pump speed of 20000 rpm. The Raindow 4720 is equipped with a single stage high vacuum turbo pumping system, which allows the unit to operate at a total pressure of <5 mTorr and a pump speed up to 8500 rpm. Rainbow 4720 utilizes an advanced etch controller that provides precise control of etching parameters, such as gas demand, etch pressure, chamber temperature, and power levels. The controller also allows the operator to enable repeatable etch runs with precise repeatability. The controller is also capable of monitoring process parameters such as changes in process chamber temperature. LAM RESEARCH Rainbow 4720 Wafer Process Station includes a vacuum loadlock chamber that is capable of holding up to four cassettes of up to 20 wafers. The wafers are then transferred into the etch chamber, which is capable of accommodating up to 216 wafers. Rainbow 4720 machine features a full range of wafer protection features that help ensure consistent etch quality. These features include adjustable gas flows, power levels, and temperature settings. Additionally, the tool includes an in-situ clean chamber that can be used to remove residual contaminants between process runs. LAM RESEARCH Rainbow 4720 is a versatile asset that is capable of performing a variety of etching processes with precise repeatability and control. It's advanced etch controller and its high throughput capability make it an excellent choice for high volume production applications. This model is reliable and cost effective and is capable of producing high quality etches with precise process control.
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