Used LAM RESEARCH Rainbow 9600 #9173006 for sale
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ID: 9173006
Lot of spare parts:
Qty Part number Description
(2) - MFC H2O Vapor 1 slm with Controller
(2) 853-491530-002 ESC Power supply assembly (810-017086-008 & 810-370182-001)
(2) 853-015763-001A Assy limit switch
(1) - MFC Ar 100 sccm
(1) - MFC O2 200 sccm
(15) 810-017031-004C ADIO Board rev C
(1) 810-017050-002C ADIO8 Board
(1) 853-032190-306E TCP Assy upper match, fixed gap
(1) 853-015130-204C Assy RF Match EXT range
(1) 515-025756-001 Paddle calibration tool
(1) 515-012168-00X Arm calibration disc
(1) 515-012169-001 Wafer centering tool
(1) 795-008885-001 Optical sight
(2) 515-009821-001 Lock pins
(1) 715-010213-003 Edge sensor calibration tool
(3) 515-097217-001 Nonmetalic driver
(3) 515-099329-001 Retaining ring pliers.
LAM RESEARCH Rainbow 9600 is an etcher / asher that offers enhanced productivity and process control for advanced etching and processing. The equipment is capable of providing advanced etching processes in a compact form factor. It is designed to offer improved process versatility, higher throughput, and better overall process control. Rainbow 9600 etcher / asher has a compact, single-wafer design for excellent process flexibility and productivity. It utilizes an industry-leading, direct-drive turret chuck and spindle for rapid wafer alignment and increased throughput. The system has two-chamber configuration for optimal load-lock and etching chamber configurations. The unit also features patented processing technologies to enhance process control. It includes an electroless-plating process that can etch on up to six etch parameters. LAM RESEARCH Rainbow 9600 also has a dynamic wafer metrology capability, allowing for improved wafer analysis during etching. The machine also has a high-speed loading for faster processing and enhanced throughput. Rainbow 9600 etcher / asher also provides advanced software for etching and process control. It includes a comprehensive user interface and powerful data analysis tools. The software also features a range of interactive control features that allow users to customize their etching and processing parameters for enhanced process reliability. LAM RESEARCH Rainbow 9600 etcher / asher also offers enhanced security and data protection. It is equipped with an integrated security tool that provides advanced encryption and authentication protocols. It also comes with a local print management asset and a secure external memory connector for easy setup and data management. Rainbow 9600 etcher / asher comes with a wide range of advanced support options, including full technical support. The model also comes with a comprehensive warranty coverage and maintenance package for added peace of mind. In conclusion, LAM RESEARCH Rainbow 9600 etcher / asher is an advanced etching and processing equipment designed to enhance process control and throughput. It is compact and versatile, offering a range of process parameters and security features for enhanced reliability. The integrated software and support packages make it an excellent choice for advanced etching and processing applications.
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