Used LAM RESEARCH Rainbow 9600 #9389854 for sale

LAM RESEARCH Rainbow 9600 is an etcher / asher that utilizes a powerful, high frequency RF (Radio Frequency) plasma source. Rainbow 9600 has a plasma source power of up to 200 watts and a 50 cubic foot work volume that can process substrates of up to 400 mm x 300 mm. Its unique design allows for a wide variety of process geometries to be executed, such as etching and cleaning on the same substrate in a single recipe without compromising process repeatability or substrate throughput. This advanced etcher / asher has an integrated batch process feature which automates substrate preparation and plasma formation for repeatable processes and superior substrate yield. LAM RESEARCH Rainbow 9600 has a load-lock equipment which can store substrates at various temperatures and atmospheric conditions, ensuring that process conditions are maintained over the entire course of a batch process. Additionally, the system's absolute pressure control feature minimizes process fluctuations, which significantly reduces the risk of end-product yield and quality issues. The unit also features a proprietary RF (Radio Frequency) generator which ensures stable and consistent etching and cleaning performance. Focused ions within the plasma adhere to the surface of the substrate, while the plasma is uniform and highly adjustable with programmable parameters such as gas flow rate. Rainbow 9600 etcher / asher is constructed with safety and environmental protection in mind. It has a single-flange exhaust machine which enables efficient transport of toxic gases from the operating chamber and reduces hazardous emissions. Additionally, the tool has a choice of seven standard gases, all compatible with NFPA certifications and environmental regulations. Overall, LAM RESEARCH Rainbow 9600 etcher / asher offers superior substrate performance and throughput due to its high frequency RF (Radio Frequency) plasma source and comprehensive process parameter adjustment. Its safety and environmental protection features make it an ideal, reliable tool for the production of high quality substrates.