Used LAM RESEARCH RB 4528 #9115317 for sale

LAM RESEARCH RB 4528 is a dry etcher / asher equipment that is used to etch and clean a variety of substrates with extremely high precision. The system is equipped with both downstream plasma processing and dry-etching capabilities with an excellent background in mass production. It is designed to deliver high-aspect ratios through a patented gas reflow technology, which provides high selectivity for low-temperature oxides. RB 4528 is composed of a robust chamber assembly with advanced baffle plate design to optimize plasma exposure. It has a low inductance design with an automatic chamber profile measurement unit, thereby allowing for consistent repeatable etch processes. The machine boasts a fast start-up time with low source resonance to help eliminate arcing and support fast ramping times for reducing warpage due to high temperature profiles. The etcher / asher is equipped with an innovative dual-action single chamber that simplifies conventional etching processes. The chamber design also has an RF power supply with energy-saving IGBT technology and a high-accuracy end-point detection to ensure stable, repeatable etching processes. The etcher / asher tool has a highly efficient heat management asset for dry-etching processes and the ability to degas wafers with multiple stations. The built-in process monitors have a fast reaction time to ensure accurate results and have an advanced safety model, allowing the user to remotely monitor the process. LAM RESEARCH RB 4528 etcher / asher equipment is equipped with optional robot handling capabilities that reduce loading time and instead are automated for continuous processes, making it suitable for high-volume demands. Furthermore, it has a wide range of gas and consumables that support a wide range of applications. RB 4528 etcher / asher system has revolutionized the industry with its top-of-the-line robust design, reliable performance, and high-precision capabilities. The unit is truly unparalleled when it comes to etching precision and thus has become an industry-standard tool for both small-scale and mass production.