Used LAM RESEARCH SEZ 223 #293658185 for sale

LAM RESEARCH SEZ 223 is a versatile, innovative wafer etcher or "asher" used to etch wafers and other substrates in semiconductor applications. It features a modular design, allowing for the installation of additional modules to achieve higher performance or throughput. Its latest version includes upgrades enabling substrate processing rates of up to 50 wafers per hour. Also, its fast cycle times reduce the time needed to complete each cycle. SEZ 223 features a Dual Pass Color Touch Screen Interface (DPCIT) for easy monitoring and control. The DPCIT includes intuitive controls, a History Log function, and the ability to set multiple recipes in a single operation. Its laser-driven injection equipment allows wafers to be substrated onto the system faster, providing higher throughput and uniform etching performance. LAM RESEARCH SEZ 223 offers superior control and selectivity, with precision control over the entire etching process. Its adjustable platter has two separately adjustable target and support plates with distinct etch patterns and etch rates so that multiple etch depths can be attained with different etch rates. The unit can be programmed to perform re-etch operations where a portion of a wafer can be re-etched to produce a more precise etch pattern. SEZ 223 utilises advanced safety features and is equipped with a Kapton Heater, which protects the wafer from over-etching, as well as preventing burns or damage. Its patented purge machine minimises phosphoric acid vapor emission, reducing the risk of airborne emissions. The tool also has a number of process alarms and an End-of-Cycle Oxygen Concentration Monitor to ensure safety and accuracy. In summary, LAM RESEARCH SEZ 223 is a reliable, high-speed etch asset, designed to ensure precise etching, safety and throughput. Its intuitive controls and advanced features make it an ideal solution for a variety of wafer etching applications.