Used LAM RESEARCH SEZ 323 #293658166 for sale

LAM RESEARCH SEZ 323 is a highly precise etch/ash process equipment designed to meet the stringent requirements for critical photomask etching and ashing applications. The system is equipped with advanced features such as a four-lane, wheel-tracking robot, a pneumatic nozzle, and a multiple-axis etch/ash head. The unit is ideal for etching/ashing of delicate photomasks with a minimum film thickness of 0.5 microns. The machine is also equipped with multiple safety features to ensure that the etch/ash process is safeguarded from chemical or mechanical accidents. The built-in safety devices include a gas detection tool, a vacuum process safety valve, and a lid safety switch. Additionally, the asset's control model includes a built-in lockout/tag-out equipment and an emergency stop button. The system boasts a high throughput rate of up to 30 photomasks per hour. The multiple-axis etch/ash head is capable of processing four photomasks at one time, offering an efficient and cost-effective production solution. The advanced robot features a four-lane wheel-tracking unit which allows for an evenly distributed etch/ash process. Furthermore, the machine utilizes a pneumatic nozzle to reduce the risk of costly damage caused by manual contact. The tool is designed to be easily integrated into any existing production workflow, and is equipped with user-friendly software for easy operation and diagnostics. The software offers a range of customization options, allowing users to fine-tune their setup to their specific requirements. Moreover, the asset includes a wide range of accessories for etch/ash processes such as filters, nozzles, and reflectors. SEZ 323 is a highly reliable and advanced etch/ash model which offers superior performance and unsurpassed quality. The equipment is an ideal choice for photomask etching/ashing applications which require precision and reliability. With its multiple safety features and advanced functionalities, the system provides an effective solution for high-precision applications.