Used LAM RESEARCH Spare parts for Rainbow 4520 #293768929 for sale

Qty / Part number / Description (1) / 715-011642-004 / Cap lower electrode, 4" (2) / 716-011564-001 / DFP-2 Upper electrodes (1) / 810-17031-2 Rev.2 / I/O Board, ADIO Board (1) / 765-008372-001 / Encoder, Shaft, Gap (1) / 853-025903-001 / Low frequency auto tune (1) / P4SCE Rev 2.1 / Motherboard (1) / 713-028487-001 / Vespel confinement ring (1) / 716-011923-001 / Clamp attachment plate (1) / 716-028028-004 / Ceramic clamp ring upper electrode insulator (1) / 750-007747-453 / Belt, Timing, 453T Groove (10) / 766-009446-001 / Valves, 3 Way double solenoid (10) / 766-009447-001 / Valves, solenoid, 4 Way (2) / 771-090453-001 / Convectron tubes.