Used LAM RESEARCH STRIP45 #9284283 for sale
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LAM RESEARCH STRIP45 is a fast and reliable etcher/asher designed to be used in various semiconductor processes. It is a single platform system with advanced, modular technology that allows for extremely precise processing of delicate device structures. STRIP45 has a variety of features that enable a wide range of applications such as materials etching, surface cleaning, SiO2 sidewall etching, and via metal etching processes. LAM RESEARCH STRIP45 is equipped with state-of-the-art hardware for high productivity and flexibility. It boasts a 4-inch i-line/DUV, a DUV hotplate, a 200mm a-line/DUV, and a Uni-programmable 50 chamber. Each chamber can be customized with various gas flows, pressure, temperature, and flow rate configurations. Additionally, a low-temperature, low-vacuum, solid-state etching capability is available. STRIP45 also comes with software that provides customizable process recipes, data logging, and alarm monitoring components. This allows users to develop step-by-step sequences for specific etching or ashing processes. Each step can include gas flow, pressure, temperature, and flow rate specifications for precise processing. The recipe-based process development also makes it easy to run trial, optimization, and production runs. LAM RESEARCH STRIP45 offers exceptional cleaning performance with its sonic power of 8500 Watts and a powerful, low-temperature, low-vacuum, plasma source. It can remove light organic compounds, while maintaining a stable pressure of 0.39 Torr and a temperature of 10 to 140°C in the chamber. STRIP45 also has excellent safety features to protect personnel and materials from any accidental exposure to harmful gases, and it is designed to operate with minimal noise in cleanroom environments. This simple-to-use, low-maintenance etcher/asher is ideal for many semiconductor applications and provides cost savings with quick cycle time and improved tool efficiency.
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