Used LAM RESEARCH TCP 9400 DSIE #293618056 for sale

The LAM LAM RESEARCH TCP 9400 DSIE is an etcher/asher equipment specifically designed for high-volume production of precision substrates. The system features a twin-cascaded, three-level (TC3) deposition unit, which enables quick and accurate substrate preparation. The TC3 machine provides a uniform deposition of various materials, such as nitride, silicon dioxide, titanium nitride, and aluminum nitride. The tool is equipped with a 19" wide by 27" deep main chamber, where all the deposition operations are performed indoors. The chiller cabinet, which controls the etch rate and uniformity of the layer, is included with the asset and is able to hold up to 12 cassette positions. The cassette positions can be selected via a drum selector, which can be adjusted to provide a specific etching rate, by controlling the flow and volume of the gases used in the process, as well as the duration of the process. The positions are arranged in an octagonal pattern to maximize the uniformity of the coating. The model is also equipped with an integrated, computer-controlled end-of-run cleaning equipment, using hydrofluoric acid and ozone, which ensures that substrates come out clean and uncontaminated. The system is highly versatile and can be used to deposit a variety of materials including silicon oxide, silicon nitride, aluminum and titanium nitride, silicon oxynitride, tungsten and tantalum nitride and other refractory materials. The LAM TCP 9400 DSIE can be configured with automatic feeders that provide precise control of thickness, etch rate and uniformity. The unit also includes a particle monitor, which monitors the deposition rate of the material, and deflection assembly, which helps maintain the mechanical accuracy of the substrate. The user-friendly menu-driven software is also included and provides easy setup, operation and maintenance of the machine. The tool is extremely efficient and economical in mass manufacturing, and is capable of producing substrates that can be used in many different technologies, such as optoelectronics, microelectronics, biomedical, and automotive. With its range of features, the LAM LAM RESEARCH TCP 9400 DSIE is an ideal solution for those who require high-quality etches and ashers in high-volume production.