Used LAM RESEARCH TCP 9400 SE II #9212901 for sale
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ID: 9212901
Wafer Size: 8"
Etcher, 8"
Temperature: 22 +/ -2°C
Humidity: <50 %
Vibration sensitivity: Slight
Carrier by water: 9400
Carrier by exhaust: 8400
RF Generator: 5000
Dispersed to environment: 20.000
RF Generator: 3000
Total output: 38.000
RF Generator: 8000
(5) Conditions
Type: Wye
Receptacle required: Hardwired
Power supply: 208 VAC, 50/60 Hz, 3 Phase, 80/63 A.
LAM RESEARCH TCP 9400 SE II is a benchtop plasma etcher specifically designed for a wide range of silicon and compound semiconductor applications. This equipment provides a versatile, high-performance etching solution for fabricating microelectronic devices, such as microsensors, MEMS and optoelectronic components. It features a large 17-inch color LCD touchscreen interface, allowing the user to easily control all functions with a few swipes and taps. The system also has a very wide etch window (up to 12x12 inches) and allows for multiple wafer and die levels to be processed in a single run. TCP 9400 SE II comes with a built-in power supply and hotplate, allowing for excellent etch uniformity while reducing particle generation. It also features an on-board inert-cluster software which is able to precisely control the etch time and temperature ratio for a wide range of etch chemistry, including CF4, SF6, HCl, Cl2, and HBr. Additionally, the unit has two independent load locks, enabling high throughput systems to be implemented. Furthermore, the machine supports either single-step or multi-step etching processes, allowing for a more accurate device fabrication process. The safety features of LAM RESEARCH TCP 9400 SE II have been designed to ensure a safe operating environment, including exposure guards, inert gas safety valves, and exhaust scrubber. The tool also has emergency stops and keyed on/off switches to help maintain safety. In terms of maintenance, TCP 9400 SE II requires very little, as the asset is equipped with a built-in self-diagnostics model which regularly checks the equipment's safety and performance. All of these features contribute to LAM RESEARCH TCP 9400 SE II's reputation as a high-precision etching system that is reliable and cost effective. The combination of the robust unit design and the integrated software and hardware features makes TCP 9400 SE II an ideal platform for etching a variety of materials in a safe and precise way.
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