Used LAM RESEARCH TCP 9400 SE II #9364646 for sale

LAM RESEARCH TCP 9400 SE II etcher / asher is a versatile wet processing tool designed for fast, precise plasma-based etching, ashing and related processes in semiconductor manufacturing. It utilizes an advanced linear automated motion system for maximum throughput and accuracy. The 9400 SE II provides a high-performance, low-cost solution to plasma-based etching and ashing. The 9400 SE II is suited for front-end and back-end manufacturing of semiconductor devices. It features an 8" multi-zone substrate support stage, a 4-position electrostatic chuck, and a surface mount sputter film deposition head to provide consistent plasma response and uniform etching across the entire process surface. The 9400 SE II is capable of etching up to 50 um of metal with sub-micron accuracy within a 200 mm wafer size. The stage is preconfigured for a variety of process recipes, including gas/flow control, multi-zone substrate temperature control, pattern recognition/recognition algorithm, and virtual wafer mapping. In addition, the 9400 SE II features advanced digital auto-focus and auto-scanning control software for more efficient and accurate etching processes. The 9400 SE II utilizes a highly efficient gas delivery system which distributes cool, dry gas over the process surface to maximize etching accuracy, plate uniformity, and device life. It offers precise and fast etching process with a minimum of sputter loss. It is also capable of delivering low-emission (LE) plasma to ensure optimal etching performance and minimize residual material contamination. LAM RESEARCH 9400 SE II is a reliable and robust etcher/asher, offering a safe and reliable environment for etching and ashing applications. Its modular design and remote monitoring capabilities make it an ideal solution for any application. With its high processing throughput, low-cost operations, and superior etching / ashing performance, the 9400 SE II is the etch / asher of choice for many leading-edge semiconductor manufacturers.