Used LAM RESEARCH TCP 9400 SE #293764327 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE is an etcher/asher specifically designed to perform dry etching or wet etching processes in the electronics and semiconductor manufacturing industry. It is engineered to provide excellent geometry and precise depth control, allowing exact etch pattern control. ONTRAK TCP 9400 SE is a four-chamber etch/ash equipment that uses a two-stage dry etching process to etch patterns with higher accuracy and lower costs. The first stage is a low-pressure reservoir etch whilst the second stage utilizes plasma gas and microwaves to etch into the substrate and create a fine, high-aspect ratio etch. This etch system is capable of etching in different substrate materials such as dielectrics and metals, making it a versatile etch tool. LAM RESEARCH TCP 9400 SE is equipped with advanced fine-pitch metrology, multizoning capability and multiple in-chamber process recipes. The metrology unit provides a highly accurate and reliable method of measuring etch depths and overlay accuracy. The multizone capability enables increased throughput for high-volume applications, and the ability to program in-chamber recipes allows for custom etching recipes. The etch machine is managed and controlled by an integrated basic process cabinet, which allows users to easily set up, monitor and adjust their process recipes. It is also compatible with leading-edge software such as ONTRAK TSCX software, which makes it easy to process data, monitor tool performance in real-time and export results. Furthermore, it can be easily interfaced with a number of third-party metrology systems. TCP 9400 SE is the ideal etch solution for small-to-large production runs and has been designed for minimal maintenance - its replaceable components, fast ramp-up times and relatively small footprint make it ideal for cleanroom environments. It is fully compatible with the OPC-200 cleanroom gas and wafer handling systems, ensuring consistency with respect to environmental conditions and process reliability. Overall, LAM RESEARCH / ONTRAK TCP 9400 SE is an advanced etch/ash asset ideal for a range of electronics and semiconductor manufacturing applications. Utilizing its two-stage dry etch process and integrated fine-pitch metrology, this model is capable of achieving precise etches with minimal downtime, making it an optimal solution for medium- to large-volume production runs.