Used LAM RESEARCH TCP 9400 SE #293767403 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE is an advanced etching / ashing equipment designed to be used in the semiconductor device manufacturing environment. It features a fully automated, self-contained platform capable of processing a wide range of substrate materials such as Silicon, Nitride, and various metals. The system can be customized to process other materials as needed. The etcher / asher unit is designed with a rotatable substrate holder that offers the ability to process substrates up to 6.5 inches in size. This allows for the efficient handling and etching processes of substrates, while maintaining accurate and repeatable results. Additionally, the rotatable substrate holder offers the flexibility to accommodate various etch shapes and sizes, as well as advanced etch parameters. In order to ensure optimal etch results, ONTRAK TCP 9400 SE incorporates advanced process control technologies. This includes process parameter monitoring and automatic process optimization, ensuring that the highest quality etches are produced. It also features a spark detection machine to prevent equipment damage, as well as onboard video display and control. This etcher / asher also offers maximum process flexibility, offering both manual and automatic etch rates, as well as programmable etch sequences. Additionally, process gas flow and temperature can be adjusted to match the requirements of individual etch jobs. The process gas is controlled using a multi-head gas delivery tool that includes multiple sub-banks. This provides the ability to precisely control the rate, composition and distribution of all process gases. LAM RESEARCH TCP 9400 SE etcher / asher also includes an integrated lift table. This provides for easy loading/unloading for both substrates and contaminated waste material. Additionally, an integrated safety platform incorporates a variety of safety features to ensure safety during operation. This includes an automatic shutoff asset that will shut off the etcher / asher in the event of a model malfunction or power failure. Overall, TCP 9400 SE is an advanced etcher / asher designed to provide the highest quality substrates with repeatable and cost-effective results. Its advanced process control technologies, flexible process parameters and comprehensive safety features make it an ideal solution for the semiconductor device manufacturing industry.