Used LAM RESEARCH TCP 9400 SE #293813740 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE is an etcher, also known as an asher, used in semiconductor manufacturing. ONTRAK TCP 9400 SE, which stands for "Thin Capable Platform for Semiconductor Etching," is designed for use in commercial etching production and research. It is a high throughput, fully automated equipment with four independent etchers and 11 independent process chambers. The system is capable of etching and stripping up to four wafers at a time and can perform hundreds of experiments simultaneously. At the core of the unit is a highly efficient thin-film etcher that can etch both silicon and dielectric materials at a maximum rate of 3.2 Å per second. The machine's ability to process multiple layers at once can significantly reduce the total etching time. This makes LAM RESEARCH TCP 9400 SE ideal for applications where processes are tightly constrained or performance-critical. The machine can also perform processes such as photoresist strip, etch stop, resist stripping, and arsenic doping. Its Etch Eject Assembly (EEA) is designed to ensure that the wafer surface remains free of contamination after the etching process. The EEA also helps minimize the possibility of contamination and reduce etch depth variations. TCP 9400 SE is equipped with a highly reliable 600mm x 400mm quartz tube, which is capable of maintaining high throughput and ensuring consistent wafer quality. Its 13 MFC process lines provide precise control over pressure, temperature, and gas flow. The gas flow can be varied from 0-50slpm, helping to reduce chemical consumption and better manage the process. The etcher also features an intuitive, user-friendly interface, allowing for an efficient, automated flow of data. It also comes with a set of advanced diagnostic capabilities, such as process monitoring and leak detection that offer superior process control. In addition, LAM RESEARCH / ONTRAK TCP 9400 SE is designed to conform to industry safety standards, offering a high level of protection to personnel and equipment. It is also backed by a team of expert engineers, who can provide assistance and troubleshooting when needed. All in all, ONTRAK TCP 9400 SE is a highly efficient and reliable thin-film etcher, making it an ideal choice for commercial etching. Its precision engineering and intuitive user interface enable efficient, high-throughput production, while its durability and advanced diagnostic capabilities ensure that it will deliver consistent wafer quality.