Used LAM RESEARCH TCP 9400 #293592159 for sale

LAM RESEARCH TCP 9400 is an innovative etcher and asher equipment that provides cleaning and deposition functions in a single tool. This system is designed to enable highly accurate processing of various substrates, including silicon wafers, glass, quartz, and others. TCP 9400 is equipped with a scanhead which enables precise placement of the various processing chemicals and materials on the substrate, ensuring the highest quality etching and deposition operations. This scanhead features both linear and radial swept motion, which allow the etching and deposition process to be completed with great accuracy and speed. LAM RESEARCH TCP 9400 has an integrated control station that can be accessed from the computer workstation, or from the unit console. This station provides a comprehensive user interface for setting up and monitoring the machine, as well as for communication with other systems. The tool comes with a variety of safety features, such as a gas shutoff, emergency exit, and emergency stop. TCP 9400 is equipped with an advanced plasma etching asset, which is capable of etching a wide range of substrates with ease and precision. This model incorporates the latest technologies in etching and ashing, such as high-speed oxygen plasma etch, and high-speed nitrogen plasma etch. The etcher can be used for various operations, such as oxide removal, counter doping, deep silicon etch, corner rounding and groove definition, as well as other processes. LAM RESEARCH TCP 9400 also features multi-chamber asher processes, which are specially designed to optimize both deposition and ashing processes. This is accomplished through the use of interchangeable chemical sources, and multi-zooming capabilities. Finally, TCP 9400 is equipped with an advanced safety feature, the Automatic Safety and Monitoring Equipment (ASAM). This feature scans the equipment, continuously monitoring the process parameters, and alerting the user if any unsafe conditions arise during the process. LAM RESEARCH TCP 9400 is a state-of-the-art etcher and asher that allows for quick and accurate processing of substrates. This system is equipped with a scanhead for precise control of the deposition process, an advanced plasma etcher, and a multi-chamber asher unit. Furthermore, the machine has a variety of safety features, ensuring that the process is operated in a safe and efficient manner.