Used LAM RESEARCH TCP 9400 #293758208 for sale

LAM RESEARCH TCP 9400 is an etcher / asher designed to deliver advanced etching and ashing performance. This innovative equipment is ideally suited for production volume, high manufacturing throughput applications such as flat panel display (FPD) process steps, 3D deposition/etching, photolithography and MEMS device fabrication. Since its introduction, TCP 9400 has become a very popular etcher/asher due to its flexibility, capacity and robust features. LAM RESEARCH TCP 9400 is an integrated dual chamber system for precise pattern transfer, precise gas distribution and broad process window. It uses patented Advanced Recirculating Equalizing Gas (AEG) inlet technology to create uniform gas distributions inside the unit. This precision creates optimal etch performance in the production of high-density FPD applications with small line/space (L/S) patterns. The machine's broad process window enables low/high temperature etching and very accurate etch rate/profile performance. TCP 9400 delivers high throughput performance, with options for up to 50 wafers/cycle. It also offers 99-unit high capacity cassette handling, which helps increase throughput even further. Its high temperature and direct drive mechanism allows for faster wafer transport between chambers, meaning higher rates of productivity. LAM RESEARCH TCP 9400 is highly configurable, allowing customers to tailor systems to their specific needs. It includes multiple automated hot and cold load-versus-chamber cycle management options including hot wafer processing, chamber optimization, and automatic source material switching. It also includes a range of front-end configurations, such as batch loaders, heat exchangers, high/low temperature source material senders, wafer handling robot control and wafer mapping software. The tool is also equipped with user-friendly feed selectable gas controllers, allowing operators to quickly select the desired process gases with no need for programming. The gas controllers are also compatible with multiple gases, meaning operators can easily switch to different gases for different processes. Overall, TCP 9400 is an advanced etcher/asher integrated asset designed for precision at high volumes. Its superior gas flow technology, fast turnaround time and flexibility provides users with a solution that is highly reliable and efficient.