Used LAM RESEARCH TCP 9400 #293809942 for sale

LAM RESEARCH TCP 9400 is a state-of-the-art etcher / asher that is designed to meet the demand for high precision etching and ashing in the semiconductor and advanced packaging industries. This equipment is capable of delivering high-speed, uniform, reliable processes with superior performance. TCP 9400 is equipped with a fully automated and integrated gas delivery platform, capable of delivering up to 11 gas delivery points simultaneously. It also features a highly efficient robot interface with up to three hot robots that can manipulate up to 40 wafers for manual loading and quick turnaround times. The equipment includes a vacuum pump package with a variable frequency drive and a special process chamber that is designed to minimize outgassing and minimize heat transfer between the equipment and the substrate. LAM RESEARCH TCP 9400 is capable of delivering repeatable processes such as oxide, nitride, and other etchings for high aspect ratios, with a high degree of accuracy and uniformity across multiple wafer sizes. The high throughput rates and fine process control of TCP 9400 reduce cycle times and enable increased production yields. LAM RESEARCH TCP 9400 is also equipped with a powerful process monitoring system, which monitors the entire etching/ashing process. Its operational process control parameters, including gas flow rate, pressure, temperature, and power can be programmed into the process control software. This allows for optimal management of the process, ensuring that the via, line, and contact holes are etched/ashed flawlessly time after time. In conclusion, TCP 9400 is an ideal solution for the semiconductor and advanced packaging industries, as it offers a fast, reliable, and repeatable process that delivers superior uniformity across multiple wafer sizes. Its powerful process monitoring system and automated gas delivery platform ensure that every job is finished flawlessly, providing customers with higher productivity and satisfaction.