Used LAM RESEARCH TCP 9400 #293825709 for sale

LAM RESEARCH TCP 9400 is an etcher/asher unit designed for the production of semiconductor devices. It is a highly automated equipment capable of performing in-line ablation and/or etch processes in a single operation. This system is ideally suited for medium to high-volume production of devices. This unit features a deep reactive ion etching (DRIE) chamber with a pneumatically actuated lid-open/close mechanism. This chamber is designed to enable the processing of substrates with a high degree of accuracy and precision. The chamber has an integrated heat exchanger and an additional pressure control module for accurate process control. The machine also features a single-wafer transfer robot for loading and unloading substrates from the tool. This robot provides a high degree of process flexibility and is equipped with a vision tool for reliable and efficient substrate handling. The robot is also equipped with a power module, allowing it to provide superior substrate protection and reduced cycle times. The controller unit provides the control and automation capabilities needed to run the asset. This includes operating parameters, recipe management, data logging, and connectivity to a host computer. The controller unit includes the capability to monitor and analyze process results and store recipes for future repeatability. Finally, the model features a loadlock chamber designed to hold up to 8 wafers for pre-etch and post-etch processes. This chamber includes a vacuum pump for evacuation and an oxygen injection port for inerting the chamber atmosphere. All of these components work together to produce quality, repeatable results in a consistent and dependable manner. By using TCP 9400 etcher/asher equipment, device manufacturers can produce semiconductor devices that meet their specification requirements in a timely and cost-effective manner.