Used LAM RESEARCH TCP 9400 #9053203 for sale

LAM RESEARCH TCP 9400 is an etcher / asher designed for wafer processing applications. It is a high-speed, high-resolution etching and ashing equipment capable of processing substrates up to 8 inches in diameter. This system is designed to produce extremely precise patterning with consistent results that can be consistently replicated for production scale applications. It features a high quality dual-axis gantry robotic support unit for precise motion control over the entire processing chamber, and also includes a thermal imaging sensor for reviewing the substrate's thermal profile during processing. The gantry ensures the substrate can be quickly and accurately brought to the desired processing position. The powerful mass flow controllers provide precise gas flow management with a range of compounds and require minimal user intervention. The advanced process control software allows multiple recipes to exist in the memory with up to 10 stations per recipe. The machine is built with a four-quarter load-lock chamber configuration, allowing up to four wafers to be loaded or unloaded at one time. TCP 9400 is designed to process intricate patterns and dense structures with plasma and chemical etching. It can provide instant switching between chemical and plasma processes, allowing for low cycle time production. The plasma powered systems can yield up to 200 watts of power, allowing for precise management of etching rates and uniform characteristics. In addition, LAM RESEARCH TCP 9400 features an advanced fast imaging machine for automated wafer inspection. This tool is able to measure the smallest features with sub-micron resolution and is capable of imaging the entire wafer within minutes. The machine is equipped with embedded safety features and is capable of monitoring gas and pressure management to provide an added level of safety. TCP 9400 is a high-performance etcher / asher offering significant benefits for high-volume wafer processing applications. Its advanced control asset, dual-axis gantry robotic support model, and versatile process capabilities make it an ideal choice for producing precise, consistent results.