Used LAM RESEARCH TCP 9400 #9171323 for sale

LAM RESEARCH TCP 9400 is a plasma-enhanced etcher/asher that is used for a variety of processes in the manufacturing industry. This versatile tool can etch and deposit a variety of materials such as copper, tungsten, and aluminum, as well as process specialized semiconductor materials. The tool can be used for both etching and ashing - two distinct processes for processing materials. TCP 9400 is equipped with a large plasma chamber that makes it easy to work with a variety of substrates. The chamber is designed for optimal ionization of gases and the ability to accurately set pressure, flow and temperature levels. A variety of cooling methods, from Nitrogen and Helium, to exhaust flow and active cooling, are available to ensure the best results. The machine features an intuitive graphical user interface (GUI) that is simple and easy to use. There are also a number of safety measures in place to ensure a safe operating environment. LAM RESEARCH TCP 9400 is equipped with an overpressure protection equipment and an end of wafer sensing system that both help prevent particles from escaping the chamber. The chamber also features a web monitoring unit and audit trail that can be used to access data logs and ensure optimal performance. In addition to etching and ashing materials, TCP 9400 can also be used for other processes such as layer-on-layer deposition, annealing, and polysilicon deposition. The machine also has a variety of options for configuring the pressure inside the chamber, flow rate, and other parameters. The chamber also features an advanced wafer handling machine, which ensures accurate and repeatable wafer transfer. Overall, LAM RESEARCH TCP 9400 is a versatile and reliable etcher/asher that is designed for high precision and performance in a variety of applications. The machine has a user-friendly GUI, advanced safety and data logging, and a variety of material processing capabilities. With its range of capabilities, TCP 9400 is an ideal solution for many semiconductor device fabrication processes.