Used LAM RESEARCH TCP 9400 #9180718 for sale
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LAM RESEARCH TCP 9400 is an etcher/asher equipment used for panel and IC-level flat panel processing. The system is capable of providing an ultra-high resolution etch, enabling users to produce complex patterning designs that can only be achieved through the use of high energy beams. The unit comes equipped with a state-of-the-art ablation chamber and is capable of generating high-energy beams of wavelengths ranging from multiple nanometers to 100 microns. TCP 9400 is designed to provide low-cost, high-precision processing capabilities. The machine utilizes a two-stage ablation process, wherein the first stage involves heating the substrate to generate a plasma beam that causes the desired etching or ashing of the substrate. This first stage is where the unique features of LAM RESEARCH TCP 9400 are most clearly evident. The second stage of the ablation process involves cooling the substrate to generate an ultra-high resolution etch. This process involves the use of a top-down pulsed laser that delivers short-burst high-energy beams to the substrate. This results in a clean and precise finish. The tool is also capable of controlling etch depths of up to 750 nanometers. Finally, TCP 9400 is also capable of performing a wide range of coating operations. This includes providing a wide range of treatments such as spin coating, spray coating and post-etch coating operations. These processes are used to increase pattern resolution and uniformity while also providing a robust corrosion resistance. In summary, LAM RESEARCH TCP 9400 is a high-precision etcher/asher asset designed for panel and IC-level flat panel processing. It comes equipped with an ablation chamber and is capable of generating high-energy beams of multiple wavelengths to produce ultra-high resolution etches. Additionally, it provides many coating processes to further enhance the pattern resolution and uniformity with robust corrosion protection.
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