Used LAM RESEARCH TCP 9400 #9180765 for sale

LAM RESEARCH TCP 9400 is a high-performance etcher and asher tool designed for the FEOL (Front End Of Line) processes in semiconductor manufacturing. Its advanced multi-frequency resonant technology is capable of simultaneous reactive ion etch and oxidation to achieve high-volume productivity. TCP 9400 has a large process chamber with a large substrate area. This ensures uniform substrate loading, providing high productivity and throughput. The chamber also utilizes electrostatic pinch voltage technology to provide a uniform and consistent etching process. The pinch also helps to minimize variability leading to improved profiling.The tool also features a low-frequency power frequency conversion function which helps to reduce the risk of over-etching at edges and corners. This increases the process accuracy and yields. LAM RESEARCH TCP 9400 offers a uniform source distribution which ensures a uniform etching and oxidation. It also utilizes biasing to improve etching selectivity, and to quickly remove patterned features from the substrate. The tool's advanced control technology allows the user to precisely monitor and adjust conditions like RF power and timing. This helps the user to optimize etching conditions to tailor the process to substrate materials or features size. TCP 9400 also includes a fast cycle time. This allows for high-throughput production. In addition, the tool has built-in diagnostic capabilities which allow for rapid fault detection and recovery. This makes it suitable for production environments. Its advanced software features also allow for simplified process optimization, data logging, and recipe editing. LAM RESEARCH TCP 9400 is a powerful, versatile etcher and asher tool which is designed to meet the needs of the FEOL market. Its advanced features provide excellent processing capabilities and throughput, while allowing for greater process control and optimization.