Used LAM RESEARCH TCP 9400 #9226361 for sale

LAM RESEARCH TCP 9400 is an advanced multi-function electromechanical etcher and asher equipment. This piece of technology is specially designed to deliver precise etching of features on substrates such as semiconductors, integrated circuits, and microelectronic components. TCP 9400 is capable of Ashing, cleaning, and etching layers of material at extraordinary speeds and precision levels. LAM RESEARCH designed this system and the intelligent control technology that powers it to achieve up to 5 nm thickness control accuracy with a low temperature (< 430C). This etcher / asher uses a compact ablative wafer processing chamber with a spatially configurable gas matrix to enable a wide array of process recipes and technology nodes to be achieved. It also features an advanced tunable pulse width modulation controller used to precisely control energy input to the wafer process. This allows it to achieve stable process results during operation and to perform reactive ion etching, Chemical Vapor Deposition, Biasing, and other processes quickly. LAM RESEARCH TCP 9400 is equipped with a Graphite Hot Plate that is both temperature and self-regulating in order to provide uniform heating of the substrate. This temperature is then monitored periodically and has customer customizable temperature ranges depending upon recipes and process type. For increased accuracy and safety, this etching tool has a standoff detector that continuously checks for proper distance between the target and the wafer chuck. It also has an advanced safety unit that includes interlocks that can detect process faults; components such as the Hot Plate, vacuum pumps, and gas supply lines; and Flame ion detector that monitors Radwaste gases emitted during the etching process. In terms of performance, TCP 9400 is capable of handling large substrates up to 6-inches in diameter and features a high-throughput flow machine that allows synchronous loading and unloading of wafers. It automatically tracks chamber chamber metrics such as temperature, pressure, and gas flow rate to ensure a stable process throughout the entire run. LAM RESEARCH TCP 9400 is an effective etcher and asher tool beneficial to processes such as etching integrated circuits, thin-film metallization, compound semiconductor materials, Pyrex glass, and low-k dielectric layers. Its ability to achieve precise thickness control accuracy and precise temperature control make it especially well-suited for semiconductor device fabrication.