Used LAM RESEARCH TCP 9400 #9226362 for sale

LAM RESEARCH TCP 9400 is an etcher/asher used in semiconductor device fabrication to apply specific material layers during the device formation process. TCP 9400 utilizes a Technology Communication Protocol (TCP) interface for networking of process tools, offering them the ability to interact with each other and coordinate parameters such as gas flow, temperature, time and pressure to achieve maximum process performance. LAM RESEARCH TCP 9400 can etch or asher substrates up to 500mm in size, and features a patented ZRide™ platform that provides stable, low-friction motion and maintains tight wafer patterns on the process-face height, which is important for wafer face repeatability and process uniformity. TCP 9400 utilizes LAM's Gasflow™ technology, which uses fast-acting reaction (FAR™) valves for precise enabling and disabling of process gases to quickly achieve repeatable process results with fine-tuning for specific job requirements. The equipment also features Dynamic Inerting™, which enables fast switching of inert and process gases to quickly respond to changes in the job requirements and offers high levels of control and uniformity for vacuum processes. The system is also equipped with a proprietary automated wafer handling unit that allows for single-wafer and as lot-of-wafer processing, as well as a low-pressure loadlock (LPL) chamber that enables fast substrate pre-cleaning and loading. LAM RESEARCH TCP 9400 is capable of controlling multiple ports within a single chamber, providing controlled switching of gases between the ports. To ensure safety, TCP 9400 is equipped with a suite of hardware and software safety features that prevent unauthorized access to the process chamber as well as monitor temperature, pressure, and humidity levels. LAM RESEARCH TCP 9400 also features a spill detection machine that triggers automatic shut down and cleaning if any exotic materials are detected by the tool. TCP 9400 is a comprehensive all-in-one etcher/asher asset for semiconductor device fabrication processes. With its TCP interface, gas flow technology, dynamic inerting capabilities, automated wafer handling model, and various safety features, LAM RESEARCH TCP 9400 offers sophisticated levels of control and precision for repeatable results.